superfrequency 中文意思是什麼
superfrequency
解釋
特高頻-
With the development of micro - electronics and information processing, microelectronic devices with high density, high velocity and superfrequency have been get rid of the stale and brought forth the fresh, which vastly prompt the development of the micro fabrication technologies to the field of the hyperfine, and put forward the higher requirement for the resolution of the conventional photo 1 i tho graphy
隨著微電子和信息技術的飛速發展，高密度、高速度、超高頻微電子器件不斷推陳出新，促使微細加工技術不斷向著超精細領域發展，對傳統光學光刻技術的分辨本領提出更高的要求。傳統光學光刻中提高解析度往往是以犧牲系統焦深為代價的。
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