zygo- 中文意思是什麼
zygo-
解釋
comb. f. 軛狀的，成對的。-
First. adjust the fiber to get the interferogram, use the four - step phase shifting method control the change of phase, achieve phase shifting. in data processing, take the pzt ' linear influence into account, calibrae the pzt. unwrapping the phase, gain the continuity, get the actual phase. analyzing the data with zernike orthogonal methord, fit polynomials that are not orthogonal over the data points, through visual c + + program, obtain polynomial parameters. calculate the shape of the surface, compare the result with zygo, then achieve the better experimental result
首先，經光纖耦合輸出調整得到干涉圖，採用四步相移方法，控制干涉圖位相變化，實現相移；數據處理過程中，考慮壓電陶瓷的非線性影響，進行標定；對位相進行模式展開連續性處理，得到實際位相；用zernike多項式正交化方法分析，在離散點上處理數據，經visualc + +程序設計，得到多項式系數，計算出面形分佈，同zygo所得結果進行比較。 -
The primary and secondary mirrors of the schwarzschild optics were fabricated in our institute and measured using zygo mark iv interferometer. figure errors were observed in both primary and secondary mirror of 5nm ( rms ). these magnitudes are very small at visible wavelength but sufficient to cause significant degradation in the wave - front quality of the schwarzschild optics in extreme ultraviolet ( euv ) wavelength
利用zygomark干涉儀檢測的schwarzschild微縮投影物鏡主、次鏡面形精度表明，對可見光工作波段已具有足夠高的面形精度，均為5nm （ rms ） ，但在euv （ extremeultraviolet ）波段，將給schwarzschild微縮投影物鏡帶來嚴重的波面誤差。
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