淀積銅 的英文怎麼說
中文拼音 [diànjītóng]
淀積銅
英文
cement copper-
The results indicate the stress of copper interconnects generates in the metallization and the thermal stress caused by thermal mismatch during the damascene process is the main stress. the thermal stress distribution in copper interconnects has been simulated by the finite element analysis software with the different trench structures
對測量結果的分析得出金屬薄膜的淀積是造成銅互連線中應力的主要原因,熱應力在銅互連線應力中占較大比例,熱處理后銅互連線中應力減小。For xrd, ellipsometry examinations, single - side - polished si ( lll ) wafers were used as substrates and for resistance measurement, glass was used and for infrared examination, double - side - polished si ( lll ) wafers were used and for ultraviolet - visible spectrophotometry, double - side - polished quartz wafers were used and for tem micrograph and electron diffraction pattern observation, cu nets deposited by formvar film were used. the cu - mgf2 cermet films were from 50 to 600nm thick
用於xrd分析、橢偏測量的單拋si ( 111 )晶片和電阻測試的載玻片上淀積膜厚約為600nm ;用於ir測試的雙拋si ( 111 )晶片和uv測試的石英玻璃片上淀積膜厚約為250nm ;用於透射電鏡分析的樣品則淀積在400目銅網上的支撐formvar膜上,膜厚約為50 100nm 。Occurrence and transportation of copper and cadmium in dianshan lake ' s sediments
銅和鎘在淀山湖沉積物中的形態和傳輸研究
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