短脈沖回波 的英文怎麼說
中文拼音 [duǎnmàichōnghuíbō]
短脈沖回波
英文
short-pulse-echo-
On the design of the system, the thickness measure system of mems chip is built based on lbu and pump - probe technology. on the analysis of data, the reflectivity curve is analyzed using the law of reflectivity change induced by ultrasound, and the thickness is calculated using the system designed by the article, to aluminum film the size of about 20nm can be measured, when the film be measured is single layer, the relative error of the system is less than 2 %, when the film be measured is double layer, the relative error of the system is less than 10 %
在基礎理論方面研究了激光（特別是超短脈沖激光）超聲的激勵機理，探討了激光調制技術以提高系統信噪比，闡述了泵束探針束技術及相關實驗設置；在系統設計上，以激光超聲為基本原理，以泵束探針束技術為系統設計方案完成了mems基片厚度測量系統的設計；在數據分析方法上，利用聲致光反射率變化的一般規律對測得的光反射率曲線進行分析，確定超聲回波在薄膜兩界面間來回傳播的時間，以計算薄膜的厚度。
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