硅柵加工技術 的英文怎麼說
中文拼音 [guīzhàjiāgōngjìshù]
硅柵加工技術
英文
silicon gate processing technique- 硅 : 名詞[化學] silicon （14號元素符號 si）
- 柵 : 柵名詞（柵欄） railings; paling; palisade; bars
- 工 : Ⅰ名詞1 （工人和工人階級） worker; workman; the working class 2 （工作; 生產勞動） work; labour 3 ...
- 技 : 名詞（技能; 本領） skill; ability; trick; technique
- 術 : 術名詞1. （技藝; 技術; 學術） art; skill; technique 2. （方法; 策略） method; tactics 3. （姓氏） a surname
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By studying and using conventional 1c process in combination with electron beam lithography ( ebl ), reactive ion etching ( rie ) and lift - off process, several efficient results are produced : semiconductor and metal nano - structures are fabricated ; the matching problem of photolithography and electron beam lithography is well solved ; the process efficiency is improved ; the process is offered for the controlled fabrication of nano - structures by repetitious process testing ; several nano - structures such as si quantum wires, si quantum dots, double quantum dot structures and tri - wire metal gate are firstly fabricated by using ebl and rie processes
研究利用常規的硅集成電路工藝技術結合電子束光刻，反應離子刻蝕和剝離等技術制備半導體和金屬納米結構，很好地解決了普通光刻與電子束光刻的匹配問題，提高了加工效率，經過多次的工藝實驗，摸索出一套制備納米結構的工藝方法，首次用電子束光刻，反應離子刻蝕和剝離等技術制備出了多種納米結構（硅量子線、量子點，雙量子點和三叉指狀的金屬柵結構） 。Silicon grating is a period construction fabricated on the silicon wafer by micro fabrication techniques as ultraviolet lithography and anisotropic etching
硅光柵是利用紫外光刻、各向異性腐蝕等硅微加工技術在矽片上製作的周期結構。A method to make blazed silicon gratings is designed. the fabrication of ( 100 ) and ( 111 ) silicon wafer grating is performed by bulk silicon techniques. the surfaces of silicon gratings have been tested by afm
設計了一種製作閃耀硅光柵的方法，利用體硅加工技術分別進行了（ 100 ）面矽片和（ 111 ）面矽片光柵的製作，對光柵的表面進行了測試。
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