硅氮烷 的英文怎麼說
中文拼音 [guīdànwán]
硅氮烷
英文
silazane-
At the same time, especially in air two peaks turned little and became a continuous process at low heating rate ( 5 c / min ). the residue was 15 % in air compared to 3 % in n2, because pdms turned into sio2 of solid state in air, but ds of gas state in na
發現在氮氣氣氛中的殘留物重為3 ，而在空氣下為15 ，這是因為聚硅氧烷在氮氣中分解成環三硅氧烷揮發了，而在空氣中形sio _ 2 。The experiments indicate that the deposition rate will increase with the increase of the flow ratio of sihu / nhs, slightly decrease with the increase of substrate temperate, and increase obviously with the increase of rf power
氮化硅薄膜的折射率隨硅烷氨氣流量比增大而增大，隨溫度升高而略有增加，隨淀積功率增大而略為降低。By the pecvd ( plasma enhanced chemical vapor deposition ) system and the reactants of silane and ammonia, silicon nitride thin film with excellent anti - reflective and passivation effects was prepared. the relatively optimum parameters for depositing sinx thin film and the basic physical and chemical properties of sinx were investigated. the effects of substrate temperature, the flow ratio of silane over ammonia and the rf power on the refractivity and deposition rate were researched
實驗表明，氮化硅薄膜的沉積速率隨硅烷氨氣流量比增大而增大，隨溫度升高而略有降低，隨淀積功率增大而明顯增加；在襯底溫度300 ，射頻功率20w和硅烷氨氣流量比為1 ： 3的條件下氮化硅薄膜的沉積速率大約為8 . 6納米分。
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