端部退火的 的英文怎麼說
中文拼音 [duānbùtuìhuǒde]
端部退火的
英文
ends annealed- 端 : Ⅰ名詞1 （東西的頭） end; extremity 2 （事情的開頭） beginning 3 （門類; 方面） item; point 4 （原...
- 部 : Ⅰ名詞1 （部分; 部位） part; section; division; region 2 （部門; 機關或組織單位的名稱） unit; mini...
- 退 : 動詞1 （向後移動） retreat; draw back; move back 2 （使向後移動） cause to move back; remove; wit...
- 火 : fire
- 的 : 4次方是 The fourth power of 2 is direction
- 端部 : telos
- 退火 : [冶金學] anneal; annealing; back-out
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In this paper, the flow pattern defects ( fpds ) were revealed by secco etchant and their shape, distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ). the relationship between etching time and the tip structure of fpds was also discussed. furthermore, by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar, the annihilation mechanism of fpds was discussed in this paper
本文將cz硅單晶片在secco腐蝕液中擇優腐蝕后，用光學顯微鏡和原子力顯微鏡對流動圖形缺陷（ flowpatterndefects ， fpds ）在矽片中的形態、分佈及其端部的微觀結構進行了仔細地觀察和研究，並討論了腐蝕時間對fpds缺陷端部結構的影響；本文還通過研究ar氣氛下快速退火（ rapidthermalannealing ， rta ）對fpds缺陷密度的影響，初步探討了fpds的消除機理。
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