膜片壓模 的英文怎麼說
中文拼音 [mópiānyāmó]
膜片壓模
英文
pressure unit-
After short introdution about the mathematics model of the semiconductor pressure sensor, it was described that was the holistic design thought of the sensor which reserched into, from the format design, the separated retia slice, sensitive orgen of strucsure and the overall design thought for stucsure point of design
在簡要介紹了半導體壓力傳感器的數學模型后，從版圖、隔離膜片、敏感元件的結構、整體結構等方面的設計，闡述了對所研製的傳感器的整體設計思想。This thesis built the model of micropump, the deformation of the micropump membrane and the volume change of the micropump chamber under piezoelectric - drive were simulated by finite element method ( fem ). the effects of the membrane thickness, shape and piezoelectric voltage on the volume change of membrane were analyzed. the relation between intrinsic frequency and membrane thickness was also discussed
建立了微泵膜片的有限元模型，採用直接耦合法模擬分析了微泵膜片在壓電驅動下產生的形變和由此引起的微泵腔體體積的變化，得出了膜片厚度、形狀、和壓電驅動電壓對微泵腔體體積變化的影響。This thesis presents the theoretical analysis about the design of the tunable antennas with multilayered structure theory and microstrip antenna ' s analytical methods. and it improves three typical kinds of antennas, and uses the voltage controlled ferroelectric materials. we analyze the tuning features of the antenna by simulation under the condition of different permittivity of the ferroelectric materials, and discuss the feasibility of improvement from microstrip antenna to tunable antenna
本文結合多層介質理論及微帶天線的分析方法對可調諧天線進行理論分析，並對矩形貼片天線、圓形貼片天線、微帶振子天線三種典型的微帶天線結構進行改進，引入壓控鐵電薄膜材料，模擬分析在改變鐵電薄膜介電常數條件下天線的調諧特性，討論微帶天線改進為可調諧天線的可行性。Using the microwave selective heating property for materials, by setup equivalent equation, and first time inducing the electromagnetic field perturbation theory to the design of heating materials for substrate in mpcvd, three temperature distribution modes were established, including temperature distribution comprehensive mode of inhomogeneous plasma, temperature distribution composite mode of composite substrate materials, temperature distribution perturbation mode of composite materials, which ii provided an whole new technology route to the design of substrate heating system in mpcvd and guided the preparation of heating materials for substrate. and then the heating materials for substrate were designed and optimized to obtain large area homogeneous temperature distribution even larger than substrate holder ' s diameter. as an important part, this thesis researched the nucleation and growth of diamond films in mpcvd, systematically researched the effects of substrate pretreatment, methane concentration, deposition pressure and substrate temperature etc experimental technologic parameters on diamond films " quality on ( 100 ) single crystal silicon substrate in the process of mpcvd, characterized the films qualities in laser raman spectra ( raman ), x - ray diffraction ( xrd ), scanning electron microscopy ( sem ), infrared transmission spectra ( ir ), atomic force microscopy ( afm ), determined the optimum parameters for mpcvd high quality diamond in the mpcvd - 4 mode system
該系統可通過沉積參數的精確控制，以控制沉積過程，減少金剛石膜生長過程中的缺陷，並採用光纖光譜儀檢測分析等離子體的可見光光譜以監測微波等離體化學氣相沉積過程；利用微波對材料的選擇加熱特性，通過構造等效方程，並首次將電磁場攝動理論引入到mpcvd的基片加熱材料的設計中，建立了非均勻等離子體溫度場綜合模型、復合介質基片材料的復合溫度場模型及復合介質材料溫度場攝動模型，為mpcvd的基片加熱系統設計提供了一條全新的技術路線以指導基片加熱材料的制備，並對基片加熱材料進行了設計和優選，以獲取大面積均勻的溫度場區，甚至獲得大於基片臺尺寸的均勻溫度區；作為研究重點之一，開展了微波等離體化學氣相沉積金剛石的成核與生長研究，系統地研究了在（ 100 ）單晶硅基片上mpcvd沉積金剛石膜的實驗過程中，基片預處理、甲烷濃度、沉積氣壓、基體溫度等不同實驗工藝參數對金剛石薄膜質量的影響，分別用raman光譜、 x射線衍射（ xrd ） 、掃描電鏡（ sem ） 、紅外透射光譜（ ir ） 、原子力顯微鏡（ afm ）對薄膜進行了表徵，確立了該系統上mpcvd金剛石膜的最佳的實驗工藝參數。This paper explored the micro pressure sensor that is used for the measurement of distributed pressure at the surface of smart - skin. firstly, established the surface pressure model according to the aerodynamic properties, defined the optical measurement system that based on intensity modulation principle, discussed the components of this system and theoretical analyzed its measurement theory in detail
首先，根據空氣流動的基本規律給出機翼表面壓力分布圖，通過對光學式微型壓力傳感器的理論分析，採用強度調製法測量飛機機翼表面的壓力並建立基於此方法的光學測量系統模型，得到了壓力與敏感膜片變形以及光電轉換輸出能量之間的關系。分享友人