蝕刻出來的 的英文怎麼說
中文拼音 [shíkèchūlāide]
蝕刻出來的
英文
etch out-
The etched metal-film grids are very fragile and easy to distort, wrinkle or tear.
蝕刻出來的金屬箔格柵是很脆弱的,容易變形、皺折或撕裂。But because conventional photolithography becomes more difficult as the dimensions of the structures become smaller, manufacturers are exploring alternative technologies for making future nanochips
但由於結構變得更小后,傳統的光蝕刻法變得更難做,因此業者正在找尋其他技術,以做出未來的奈米晶片。From the simulation of peb process, we prove that peb could reduce standing wave effects and improve resist development profile. after analyzing the effects of standing wave effects on resist profiles, we bring forward a certain thickness and these effects could be ignored when resist is beyond that value. finally, the characters of thick resist profile are analyzed, and experiment results are also given
同時,在論文中還深入討論了抗蝕劑折射率變化對光場計算帶來的誤差;模擬了后烘過程對駐波效應的改善作用,論證了採用適當的后烘工藝改善抗蝕劑光刻質量的作用;分析了駐波效應對厚層抗蝕劑顯影輪廓的影響,提出了一個可以忽略駐波效應影響的抗蝕劑厚度條件值;最後還模擬和分析了厚層抗蝕劑顯影輪廓特點並給出了實驗結果。
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