退火制度 的英文怎麼說
中文拼音 [tuìhuǒzhìdù]
退火制度
英文
annealing schedule-
Glass anneal furnace combustion and temperature control
玻璃退火爐燃燒與溫度控制After dealing with post heating at the same deposit temperature, the average of transmission and reflectance of the films are smaller than unannealed ones but eopt is enlarged
相同沉積溫度下制備的薄膜樣品經過不同退火溫度和退火時間處理后,薄膜的平均透過率和平均反射率都比退火前下降,光學能隙變大。We prepare the si - sio2 and ge - sio2 thin film by using the dual ion beam co - sputtering method and the rf co - sputtering technique respectively, adjusting the substrate temperature ( ts ) and the annealing temperature ( ta ). then we analysis the structure of the thin film by using the xrd and tem
論文採用雙離子束濺射和射頻磁控濺射沉積技術,通過改變薄膜沉積過程中基片溫度( t _ s )以及薄膜制備完成後退火溫度( t _ a )分別制備了si - sio _ 2和ge - sio _ 2薄膜。Ge - sio2thin films were prepared by an rf co - sputtering technique on p - si substrates from a ge - sio2 composite target. the as - deposited films were annealed in the temperature range of 300 - 1000 under nitrogen ambience. the structure of films was evaluated by x - ray diffraction ( xrd ), x - ray photoernission spectroscopy ( xps )
當溫度較低時(沉積時的基片溫度ts 450 ,后處理退火溫度ta 800時,制備的樣品均為非晶結構,當溫度較高時( ts 450 , ta 800 )薄膜樣品中才出現si的結晶顆粒。( 2 ) uniform cdse nanowire arrays with controllable lengths have been fabricated by dc electrodeposition in the aao templates with ag as their conductive substrates from dmso system under different temperature. the nanowires with the diameters from 10nm to 50nm, and the lengths from 1 ( m to 20 ( m have been obtained
以銀作為導電基底的多孔陽極氧化鋁為模板,在dmso體系中,用恆流電沉積方法,于不同溫度下分別在直徑為10 , 20 , 50nm的aao模板中制備出了cdse納米線,並對它們進行了退火處理。With the development of the growth skill craft of gaas single crystal, the density of el2 can be controlled in 1 - 5 1016 / cm ~ 3 and its distribution becomes more uniform in gaas wafer too, so the distribution of carbon seems to be more important to determine the uniformity of electrical resistivity of si - gaas material. so it seems to be very important to study the distribution of carbon and the effect of dislocation on the distribution of carbon
隨著單晶生長技術的發展,通過退火,由於si - gaas中理論化學配比偏離, el2濃度可被控制在1 1 . 5 10 ~ ( 16 ) cm ~ ( - 3 ) ,且分佈均勻。因此碳的分佈就成為決定si - gaas材料電阻率均勻性的一個關鍵因素。所以,研究碳微區均勻性就顯得非常重要。A hydrogen and argon ions mixing beam was implanted into the deposited vanadium oxide film. after annealing, vo2 film with tcr ( temperature coefficient of resistance ) as high as 4 % was obtained. the bombardment of ar + could break v - o bond of v2o5 molecule in deposited film and implanted h + resulting in the deoxidization of v2o5, so the vo2 thin film could be prepared by proper control of the dose of ar + / h + implantation
利用離子束增強沉積設備,在ar ~ +離子束對v _ 2o _ 5靶濺射沉積的同時,用氬、氫混合束對沉積膜作高劑量的離子束轟擊,使得被氬離子轟擊后斷鍵的氧化釩分子,再被注入氫降價,然後經適當的退火,成功地制備了熱電阻溫度系數高達4的vo _ 2薄膜(國外報道值為2 - 3 ) ,並研製了單元懸空結構探測器和8 1 , 16 1線性陣列。The one deposited at 300 substrate temperature owns denser crystallites. during the annealing process, with the increasing of annealing temperature, the crystallites become bigger, and crystalline phase begins to transfer. when the annealing temperature gets to 800, tio2 transfers to rutile structure completely
( 2 )常溫下制備的tio _ 2薄膜是無定型的, 300濺射薄膜表面有緻密的晶粒,熱處理溫度升高,晶粒變大,晶相開始轉化, 800退火tio _ 2完全轉化為金紅石結構。Water steam was used as oxidant, and the optimum water steam partial pressure is between 1 10 - 4 and 5. 5 10 - 4 pa. under the optimum growth parameters, a ceo _ 2 seed layer with highly textured degree was successfully prepared. beside the one step process was experimented in this dissertation, the two step process was proposed and studied to further improve the quality of ceo _ 2 seed layer. in the two step process, about 15 nm thick of ce metal layer was deposited on metallic substrate at the first step, then water steam was introduced in the chamber, and the ceo _ 2 thin films were subsequently deposited with reactive sputtering in the
總結出沉積ceo _ 2薄膜的優化工藝條件,當沉積溫度為720 - 850 、水蒸汽分壓介於1 10 - 4 - 5 . 5 10 - 4pa之間、退火時間40min時,獲得了織構程度良好的ceo _ 2種子層薄膜; 3 .由於一步法制備ceo _ 2種子層中水分壓范圍狹窄,工藝條件難以控制,並且退火延長了薄膜的制備時間,因此,本論文又採用了兩步生長法沉積ceo _ 2種子層,即:先在ni - w基帶上沉積一層約15nm的金屬ce薄膜,再通入氧化氣氛(水蒸汽) ,繼續進行薄膜沉積。The results showed that the microstructure of as - deposited tbdyfe ii 1ms were amorphous and the crystal of tbfe2 were found in films after annealing at 500. annealing films in vaccum could improve the saturation magnetization ms and the susceptibility, decrease the coercivity and the saturaion field, and make the direction of the magnetic moments parallel to the film plane
結果表明,制備態薄膜為非晶態結構,經過500真空退火熱處理后,薄膜出現了tbfe _ 2的結晶物,薄膜的矯頑力和外場的飽和磁場大大降低,飽和磁化強度增強,初始磁化率提高,易磁化軸轉向膜面。X - ray diffraction results revealed that the structure of as - deposited smco film was amorphous and crystallization happened after the films annealed at 500 in vacuum. the magnetic tests of smco thin films showed that its coercivity reduced with the increase of film ' s thickness while the ratio of mr / ms was opposite. the films " coercivity and mr / ms declined after it annealed at 500 because the machanism of magnetization were changed from domain wall nailing into magnetic nuclear forming
研究結果表明,由於雜質fe的摻入降低了smco薄膜的磁性能;制備態smco薄膜為非晶態結構,矯頑力hc隨著薄膜厚度的增加而減小,剩磁比mr ms隨膜厚增加而增加;經過500真空退火熱處理后,薄膜出現smcos的結晶物,矯頑力hc降低, mr ms減小,磁化機制由疇壁釘扎類模型轉為形核類模型。The effect of deposited condition, include substrate temperatures, different substrates and annealing on the structural properties of zno films has been studied in considerable detail. it is found that the optimal conditions to deposit zno are below : the substrate temperature of 450c, the substrate of sapphire. the sample on this condition is 0. 3491
通過分析襯底溫度、不同襯底和退火對樣品結構的影響,得到了樣品的最佳制備條件:襯底溫度450 、藍寶石襯底,此條件下制備的樣品具有高度( 002 )取向性, ( 002 )衍射峰半高寬僅僅0 . 3491 ,原子力顯微鏡( afm )分析表明zno薄膜具有密集堆積的均勻柱狀晶粒。Experimental research into annealing schedule for twin - roll casting strip of high - speed steel
雙輥鑄軋高速鋼薄帶退火制度的實驗研究The processing parameters of preparing plzt electro - optic films were 400 of substrate temperature, 100w of sputtering power, 1 : 6 ratio of oxygen to nitrogen and 650 of annealing. the processing parameters of preparing sno2 film were room temperature of substrate temperature, 200w of sputtering power, 1 : 2 ratio of oxygen to nitrogen and 600 of the annealing temperature
制備plzt電光薄膜的最佳工藝參數為:襯底溫度400 ,濺射功率100w ,氧氬比為1 : 6 ,退火溫度為650 ;而制備二氧化錫透明電極的最佳工藝參數為:襯底溫度室溫、濺射功率200w 、氧氬比為1 : 2 、退火溫度為600 。We also show that preparation methods, working parameters, substrate orientation, the type and amounts of doped ions, and annealing temperature are all exerting influences over egd. this is why different egd values are reported in literatures
另外我們還討論了e _ g ~ d值的影響因素,如制備方法、工藝參數、基體取向、摻雜離子種類、摻雜離子數量、退火溫度等等,解釋了為什麼不同文獻報道的e _ g ~ d值有所不同。Prepared technical parameters were optimized by l9 ( 34 ) experiment analysis. a unique method for cleaning and drying of substrate - cleaning used by scour, drying used by infrared light was fished out by large numbers of experiment. chemical mechnism of zno thin film prepared by sol - gel technique was discussed by dta for the first time. by the measurements of sem, xrd and uvs, the thin film was analysed. the result proved that the thin film with strongly preferred orientation of c - axis perpendicular to the substrate surface which surface was homogenous, dense and crackfree was the crystalline phase of hexagonal wurtzite. the thin film was composed of plentiful asteroidal crystal which crystal dimension approximately 10 30nm. the average transmittance of thin film in visible region was above 90 %. the results of measurements else also proved that the thickness of single dip - coating was 75 240nm, this films resistivity was found to be 3. 105 102 3. 96 105 ? cm. the thickness and resistivity of thin film influenced by dope - content, withdrawal speed, pre - heat - treatment, anealing were reseached respectively
利用xrd 、 sem以及uvs光譜儀等分析方法對薄膜進行了研究,結果顯示,所制備的薄膜為六方纖鋅礦型結構,具有高c軸擇優取向性;表面均勻、緻密,薄膜材料由許多星狀晶粒組成,晶粒尺寸大約為10 - 30nm左右;薄膜可見光透過率平均可達90 % ;對薄膜厚度以及電學性能進行了測定后發現:單次鍍膜厚度約為75 - 240nm , al ~ ( 3 + )離子摻雜型氧化鋅薄膜的電阻率在3 . 015 102 - 3 . 96 103 ? cm范圍內;分別研究了摻雜濃度、提拉速度、預燒溫度、退火溫度等工藝參數對薄膜厚度和電阻率的影響。In this paper, we employ the plasma enhanced chemical vapor deposition ( pecvd ) to prepare high quality zno thin film at low temperature using a zinc organic source ( zn ( c2h5 ) 2 ) and carbon dioxide ( co2 ) gas mixtures. the effect of the substrate temperature and annealing temperature on the quality of zno thin films was studied in detail
為了在低溫下制備高質量的氧化鋅薄膜,我們採用金屬有機源和二氧化碳氣源,首次利用等離子體增強化學氣相沉積的技術在低溫下制備了高質量的氧化鋅薄膜,確定了生長高質量氧化鋅薄膜的優化條件;研究了不同的襯底溫度和退火溫度對氧化鋅納米薄膜質量的影響。The results indicates that superconducting mgb2 thin films can be prepared by hfcvd in a single - step with the maximum critical transition temperature tc of 36k ; the best critical transition temperature tc of thin films grown by hpcvd in a single - step is 34k. the optimal zero resistance temperature tco of thin films fabricated ex situ is 37 k by post - annealing of precursor b film at 800 for 1 h under high mg vapor pressure
實驗結果表明,用hfcvd法在400原位制備了臨界溫度為36k的mgb2超導薄膜;用hpcvd法在700原位制備了臨界溫度為34k的mgb2超導薄膜;將300制備的前驅物b膜在mg蒸氣中800保溫1h非原位退火,制備了臨界溫度為37k的mgb2超導薄膜。During the inspection by afm and sem, we found that the surfaces morphology of samples was even and smooth, the surface roughness was small. the films were composed of some excellent columnar crystallites. the xps results were found that zn existed only in the oxidized state and the concentration of al was less and the presence of loosely bound oxygen on the surface of azo thin films was reduced after ar + etching
由以上對azo薄膜的組織結構和光電性質的研究,我們得到了用直流反應磁控濺射法制備azo薄膜的最佳工藝條件為:氧氬比0 . 3 / 27 ,襯底溫度200 ,工作壓強5pa ,靶基距7 . 5cm ,功率58w ,退火溫度400 。In this paper, multilayered pt / bst / pt thin film capacitors were fabricated by the sol - gel process. both the reverse and forward leakage currents of the pt / bst / pt capacitors were reduced several orders of magnitude by employing this multilayered structure with top and bottom layers annealed at low temperatures during the sol - gel deposition of bst films
本文採用溶膠-凝膠法,通過降低最底層和最上層的退火溫度,在pt ti sio _ 2 si襯底上制備了非晶多晶型bst多層膜,不僅改善了正向漏電流特性,而且也改善了反向漏電流特性。分享友人