anisotropic etching 中文意思是什麼
anisotropic etching
解釋
蛤異性腐蝕- anisotropic : adj. 1. 【植物；植物學】對外界刺激有不同反應的。2. 【物理學】各向異性的。anisotropically adv.
- etching : n. 1. 蝕刻法；蝕刻（銅）版畫；蝕鏤術。2. 蝕刻畫，蝕刻版，蝕刻版印刷品。
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Computer simulation of silicon anisotropic etching
硅各向異性腐蝕的計算機模擬 -
For the first time, an integrated waveguide turning mirror ( 1wtm ) in soi was put forward and realized. using anisotropic etching technology with koh solution, the mirror surface was very smooth with root square roughness only 5. 19nm, and the mirror was vertical to the wafer surface because of the crystalline relationship
論文首次設計並製作了soi上集成波導式轉彎微鏡（ iwtm ） ，利用硅的koh各向異性腐蝕特性製作出的微鏡表面非常光亮，均方根粗糙僅為5 . 19nm ，並且由於鏡面是腐蝕出的晶面，其與晶片表面非常垂直。 -
Silicon grating is a period construction fabricated on the silicon wafer by micro fabrication techniques as ultraviolet lithography and anisotropic etching
硅光柵是利用紫外光刻、各向異性腐蝕等硅微加工技術在矽片上製作的周期結構。 -
The result of experiment proves that the design and manufacture project for silicon magnetic - transistor is feasible completely, specially, in the course of manufacturing magnetic - transistor technique, anisotropic etching is applied and reliable technique project is provided in order to manufacturing silicon magnetic - transistor with rectangle - plank cubic construction, these technologies can be compatible to ic technology, integrated easily and there is a wide application field
本文根據實驗結果，確認了該硅磁敏三極體設計、製作方案完全可行。尤其在硅磁敏三極體的製作工藝中採用了硅各向異性腐蝕技術，為實現在矽片上製造具有矩形板狀立體結構的硅磁敏三極體提供了可靠的技術方案。製作工藝不但能與ic工藝相兼容，而且便於集成化，將有廣泛的應用領域。 -
Based on silicon - piezoresistive method, the paper first gives the theory of array silicon piezoresistive pressure, acceleration sensor, and the design of its incorporated chip, microstructure and out - circuit. several key techniques of making array silicon piezoresistive pressure, acceleration sensor such as 1c technic, mems ( silicon - silicon direct bonding, anodic bonding, anisotropic etching ) is also studied. minuteness engine machining, anode bonding etc. in the paper there are three ways which are examine - form, curve simulanting, to carry out sensors non - linear self - emendating ; adopt the several curves approaching and curve simulating to achieve the aims of sensor error self compensation, fusion technology etc. therefore, it providing referenced values of ways and directions for sensor system directing on
論文首先以硅壓阻效應原理為基礎，討論了陣列式硅壓力、加速度傳感器的設計原理，並對陣列式硅壓力、加速度傳感器中集成敏感晶元（壓力、加速度） 、總體結構和壓力陣列的信號處理電路進行了設計，在陣列式硅壓力、加速度傳感器的研製中，還研究了半導體平面工藝、大規模集成電路技術、微機械加工技術（硅硅鍵合、靜電封接、各向異性腐蝕）等關鍵技術的應用。
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