capacitance accelerometer 中文意思是什麼

capacitance accelerometer 解釋
電容式加速度表
  1. Accelerometer is used widely for measuring acceleration in civil and military field. at present, there are several type of accelerometers such as piezoelectricity electric charge accelerometer, ic piezoelectricity electric accelerometer, compressive resistance accelerometer and alteration capacitance accelerometer. the main part in alteration capacitance accelerometer is capacitance measurement circuit. foreign countries have produced accelerometer that have tiny volume and high performance. however, our country is not able to produce such accelerometer due to the lack of technique

    加速度計作為一種測量加速度的儀器，在民用、軍用領域都有廣泛的應用。目前市場上的加速度計主要有壓電式電荷加速度計、集成電路式壓電加速度計、壓阻式加速度計、變電容式加速度計等幾種類型的加速度計。變電容式加速度計的設計中一個重要的環節就是電容檢測電路的設計。
  2. The accelerometer which has simple fabricated process and high sensitivity and small parasitic capacitance and residual stress is hybrid integrated with the interface circuit using ic nude chip. so the density of the package is increased, and the noise of the sensing system is decreased. these found the base of capacitive accelerometer module using the mcm method

    該傳感器製作工藝簡單，靈敏度高，支撐梁採用u型，減小了刻蝕后的殘余應力，用玻璃作為襯底，減小了襯底和硅可動質量塊間的寄生電容，且把傳感器晶元和用ic裸片製作的介面電路集成在一起，提高了封裝密度，減小了傳感器系統的噪聲，為採用mcm技術製作電容式加速度傳感器模塊打下了基礎。
  3. In this thesis, we focus on dual axis capacitance vibration transducer, which was fabricated by micro - electromechanical systems ( mems ). the operation mechanism of this kind of accelerometer was analyzed. under external acceleration, the space between sensitive quality mass and detecting electrode will change, which causes the variation of equivalent capacitance

    本論文研究了採用微機械加工技術（ mems ）製作的雙軸電容式振動傳感器，其基本工作原理是利用慣性質量塊在外界加速度的作用下與檢測電極間的空隙發生改變，從而引起等效電容的變化來測定振動加速度的。
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