coherent filtering 中文意思是什麼
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Based on the theory of partial coherent diffraction and frt, an approach for fractional fourier domain filtering is presented as a new wavefront engineering method to improve the image quality in photolithography
基於部分相干成像理論和分數傅立葉變換濾波等理論，我們提出了利用分數傅立葉域濾波改善光刻成像質量的波前工程新思想和新方法。
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