dry plasma etching 中文意思是什麼
dry plasma etching
解釋
等離子干法刻蝕-
To approach as a resist in dry etching processing, etching properties of the films in oxygen plasma have been investigated
為了探索該種薄膜在干刻蝕工藝過程中用作掩膜的可能性,還研究了它在氧離子體中的刻蝕性能。
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