etching board 中文意思是什麼
etching board
解釋
腐蝕版印刷用紙板-
With the development of printed circuit board ( pcb ), liquid photo imageable etching resist ink has become the prime process technology of the fine line graph facture
摘要隨著印製電路板（ pcb ）行業的飛速發展，液態光致抗蝕油墨已逐漸成為精細導線圖形製作的主要方法。 -
Suit for etching flower patterns on stainnless steel board and other products. without pollution, stable quality, a recycle liquid, suit for wide plane and automatic industrial manufacture
適合不銹鋼平板及相關製品電化學腐蝕各種花紋圖案，無污染、質量穩定、溶液可反復使用，適合大平面及自動化生產線。 -
This thesis work has researched the fabrication technics of photonic crystal defect waveguide with air - bridge structure and collecting waveguide ; suggested using uv - lithography and wet etching to fabricate traditional waveguide, after that, using eb - lithography and dry etching to fabricate photonic crystal holes, so can reduce the fabrication cost by a big range ; designed the moulding board, which can fabricate the air - bridge structure and is convenient for recognizing position in eb - lithography ; the structure consisted of traditional waveguides and etching grooves are fabricated on soi successfully, then an successful eb - lithography is realized on the structure, the defect waveguide collected with the traditional waveguide quite well ; used the etching grooves to do the sacrificial layer etching experiment, which grounded etching sacrificial layer by photonic crystal holes in next step
提出採用紫外光刻工藝製作傳統波導結構之後，通過電子束曝光和干法刻蝕製作光子晶體小孔的工藝方案，大幅度減低了製作成本；設計出可形成空氣橋結構、並且適用於電子束曝光位置識別的光刻模板，在soi材料上成功製作出帶有空氣橋刻蝕預留槽以及接續光波導的結構，在該結構上成功實現了光子晶體帶隙波導的電子束曝光，帶隙波導與接續光波導位置接續良好；最後利用預留槽進行了刻蝕犧牲層的實驗，為下一步利用光子晶體小孔刻蝕犧牲層形成空氣橋結構打下了基礎。
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