grounded anode 中文意思是什麼
grounded anode
解釋
接地陽極-
Under typical discharge condition, the substrate floating potential is - 5v as the arc source is floated to the ground, but drops to - 60v in the case of the anode being grounded
在典型的放電條件下,當陽極接地時,基片臺懸浮電位最高達- 60v ,而當陰極接地或弧源懸浮時,該電位通常只有- 10v左右。
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