ion cyclotron resonance method 中文意思是什麼
ion cyclotron resonance method
解釋
離子迴旋共振法-
In view of its virtue of high degree of electron and ion generations, the microwave electron cyclotron resonance ( mwecr ) cvd method is expected to deposit device quality a - si : h at high deposition rate
鑒于微波電子迴旋共振化學氣相沉積( mwecrcvd )系統具有電子和離子產生率高等優點,人們期望它能在較高的沉積速率下獲得器件級質量的a - si : h薄膜。
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