microelectromechanical systems 中文意思是什麼

microelectromechanical systems 解釋
微機電系統
  1. Low, t. s., and guo, w., 1995, “ modeling of three - layer piezoelectric bimorph beam with hysteresis ”, ieee journal of microelectromechanical systems, 4, ( 4 ), pp. 230 - 237

    馮榮豐、楊竣翔、韓長富， 2003 ， 」磁滯與摩擦力考慮的奈米定位」 ，物理雙月刊二十五券三期。
  2. Mechanical modeling of mesa - diaphragm structures in microelectromechanical systems

    彈性膜結構的力學建模與模擬
  3. Paper 8 - devoe, don l., and albert p. pisano. " modeling and optimal design of piezoelectric cantilever microactuators. " journal of microelectromechanical systems 6, no. 3 ( september 1997 ) : 266 - 270

    論文9純納米管纖維的賴斯提純制備，與凱夫拉爾纖維、采龍纖維相似的先進纖維制備方法
  4. Abstract : recent studies on ferroelectric thin films, multilayered films and heterostructures are reviewed. the advantages and disadvantages of different processing methods for ferroelectric thin films are discussed. applications of the films, especially in ferroelectric memories, microelectromechanical systems and pyroelectric infrared detectors are described. some key problems are outlined

    文摘:綜述了鐵電薄膜、多層膜和異質結構研究的新進展，分析了鐵電薄膜不同制備方法的優缺點.重點介紹了鐵電薄膜在鐵電存儲器、微電子機械繫統及熱釋電紅外探測器方面的應用.指出了目前鐵電薄膜及器件設計研究需要重點解決的一些問題
  5. Kionix manufactures inertial sensors using plasma micromachining, a highly - refined, proprietary, deep reactive ion etch drie fabrication technology. the resulting products are ultra - small mechanical elements integrated with electronics to create microelectromechanical systems mems

    Kionix的慣性sensor採用的plasma微機電製程，是一種經高度改良且有獨家專利製程，使產品的機械結構部份做到最小並同時與電子電路結合形成一先進的微機電產品
  6. Utilizing their shape memory effect ( sme ), titanium - nickel ( tini ) shape memory alloy ( sma ) films have the potential to become high performance actuating materials for microelectromechanical systems ( mems ) due to their ability to generate large forces with large power - to - volume ratio, high recoverable strain, low power consumption, biocompatible property, and long lifetime

    利用其形狀記憶效應原理， tini形狀記憶合金（ sma ）薄膜以其大的輸出力和變位、高的功率密度、良好的生物相容性、低功耗以及長壽命，有望成為微機電系統（ mems ）中高性能的微驅動材料。
  7. With the growth of micromachining process technologies for microelectromechanical systems ( mems ), the surface micromachining technique has been increasingly used in the fabrication of sensors and actuators

    隨著mems加工技術的發展，表面微機械加工技術已經越來越多的應用於傳感器和執行器的製造過程中。
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