micromachining 中文意思是什麼

micromachining 解釋
微製造
  1. Laser ablation and micromachining with femtosecond laser pulse

    飛秒脈沖的激光損傷及微加工
  2. In the dissertation, the effects of the air slide - film damping on the capacitive accelerometers having different slot structures which are completely or partly etched, and fabricated by the anodic bonding between silicon and glass and bulk silicon micromachining process are researched by changing the distance between the moving structure and substrate, the thickness of the structure, the width of the completely etched slot structure, the depth of the partly etched slot structure according to the two well known air slide - film damping models

    對于橫向運動的體微機械器件，其周圍空氣表現為滑膜阻尼。本文基於滑膜阻尼的兩個模型，通過改變振子與襯底的間距、振子的厚度、刻透的柵槽的寬度、沒有刻透的柵槽的深度等參數，研究了這些參數對硅?玻璃鍵合工藝製作的體硅微機械電容式傳感器阻尼特性的影響。
  3. Circulating device is needed in electrochemical etching course. the consequences are benefit to silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about silicon deep - holes etching technology

    其結果對進一步開展這方面的研究工作具有指導意義，在進一步深入開展研究電化學體硅微加工技術時，可有望成為實現硅深孔列陣加工的新技術。
  4. Modern infrared ( ir ) focal plane arrays ( fpa ) technology has become a advanced comprehensive technologies, including ir material, optics, crygenics, solid - state micromachining technique, microelectronics, and so on. irfpa plays an important role in military affairs, and can be widely applied in industry and civil fields

    當今的紅外焦平面技術已發展成為集紅外材料、光學、製冷、硅微機械加工和微電子於一體的高科技綜合技術，它對國防建設有著非常重要的意義，在工業和民用領域也有著極其廣泛的市場前景。
  5. Fabrication process of the microgripper based on silicon bulk micromachining is designed. effects of footing and lag in icp and bonding failure are discussed as emphases. the cantilever type gripping finger that is 6 m wide and 5471 m in equivalent length was released successfully characteristic of comb - drive electrostatically actuated microgripper is tested

    進行了大量的工藝試驗和分析，特別對大深寬比的超長長度懸臂梁型夾持臂及梳狀驅動結構進行了深入研究，解決了微細加工工藝中的關鍵技術。
  6. Micromachining of monocrystal silicon by excimer laser direct etching

    準分子激光直接刻蝕單晶硅研究
  7. Thermal analysis of silicon micromachining based micro hotplates

    基於硅微加工工藝的微熱板傳熱分析
  8. Besides the simple control and relatively larger force by increasing the dimensions, one of the most important reasons for this is that the basic elements of the microactuators can be fabricated with ic - compatible micromachining technology, such as electroplating of ni - fe alloy, a soft magnetic material, and structuring of plane and three - dimensional coils by resist micromoulding and electroplating

    最後，最為關鍵的是磁驅動的基本材料與微機械加工技術是相兼容的，它們可以採用微機械加工方法進行加工。光開關的切換可以通過懸臂梁下端的電磁鐵線圈中的電流進行控制。
  9. Mems optical switch for optical communication is fabrication by silicon surface micromachining technology. surface micromachining technique, based on the standard cmos processes, in the other hand, offers greater flexibility for realizing free - space optical systems on a single chip

    Mems光開關是採用表面微細機械加工技術製作而成，硅表面微機械加工技術是以cmos集成電路工藝為基礎的，它可以靈活地把光開關集成在一塊矽片上。
  10. The chip is fabricated using micromachining technology and porous silicon sacrificial - layer technique is used to realize the integrated structure

    晶元利用微機械加工技術進行製作，採用了多孔硅犧牲層技術實現梁膜一體結構。
  11. For the detector design, mems surface micromachining techniques were incorporated tofabricate a simple micro polysilicon air - bridge heater filament with integrated polysilicon electrodes

    有關這個檢測器的設計，是將mems表面微切削加工技術與帶有集成的多晶硅電極的簡單微多晶硅空運線加熱絲的製作結合在一起。
  12. Micromachining of wideband optical materials with ultra - short laser pulses

    超短激光脈沖對寬帶光學物質的微加工
  13. Pulses in the nanosecond and subnanosecond regimes with high power and high repetition rate have wide applications in lidar, ranging, remote sensing, microsurgery, micromachining, and so on

    高峰值功率、高重復頻率的納秒至幾百納秒的脈沖激光，廣泛地應用於激光雷達、激光測距、遙感遙控、微型手術和微型機械方面。
  14. Focusing on a tuning fork vibratory gyroscope fabricated through silicon bulk micromachining, the matrix perturbation technology in the random finite element method was introduced to analyze the statistical characteristics of the natural frequencies and output capacitance of tuning fork vibratory gyroscope

    摘要以一種通過體微機械加工技術制備的音叉振動式微機械陀螺為對象，基於隨機攝動技術定量計算了微陀螺固有頻率變異和檢測輸出電容變異的統計特徵，以概率思想表達了微陀螺批量加工過程所帶來的材料尺寸隨機誤差對其性能的影響。
  15. Laser microprocessing is a new branch of laser processing technology. it has been widely used in the fields of fine mechanical system and micromachining

    激光微加工技術作為激光加工技術的一個新興分支，已被越來越廣泛地應用於精密機械加工、微機械製造等諸多領域。
  16. Kionix manufactures inertial sensors using plasma micromachining, a highly - refined, proprietary, deep reactive ion etch drie fabrication technology. the resulting products are ultra - small mechanical elements integrated with electronics to create microelectromechanical systems mems

    Kionix的慣性sensor採用的plasma微機電製程，是一種經高度改良且有獨家專利製程，使產品的機械結構部份做到最小並同時與電子電路結合形成一先進的微機電產品
  17. The specification, constitution features and some critical problems for a practical excimer laser micromachining tool with mask projection techniques are described. its applications are briefty introduced

    摘要介紹了研製成功的掩模投影式實用型準分子激光微細加工機的主要技術指標、結構特點、研製中解決的關鍵單元技術，並簡要介紹其應用。
  18. An effective micromachining process is developed to improve the reliability of the metal wire in the multi - sensor and to avoid adhesion between the pyrex glass and silicon mass in the process of anodic bonding

    針對晶元上各電阻間金屬引線的可靠性問題和加速度傳感器質量塊吸附問題提出了有效的改進方法。
  19. This dissertation introduces the technique of bulk micromachining, and explains the fabrication process of this optical - switch on emphases

    本論文在闡述了常用的微機械加工工藝的基礎上，重點介紹了這種微機械光開關的製作過程。
  20. The capacitive accelerometers fabricated by bulk micromachining process have large sensitive mass, small noise and high resolution compared to the ones fabricated by surface micromachining process

    用表面微機械製作的電容式傳感器，其敏感質量較小、熱機械噪聲大、解析度不摘要高。
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