nonlinear capacitance 中文意思是什麼
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Experimental results show that the bistable of tuned substrate self - bias was determined by discharge gas pressure, discharge power and tuning circuit parameters etc. the bistable exists is because of there is capacitive coupling in icp system and sheath capacitance is nonlinear
實驗結果表明這種跳變回滯現象與等離子體的放電氣壓、射頻功率以及調諧外電路的參數等多種因素密切相聯系。而產生跳變回滯現象的原因是icp中存在容性耦合以及鞘層電容具有非線性特性。 -
The nonlinear change of sheath capacitance result in the nonlinear change of tuned substrate self - bias
鞘層電容的非線性變化導致了基片偏壓的非線性變化。
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