residual capacitance 中文意思是什麼
residual capacitance
解釋
剩餘電容- residual : adj 殘余的，剩下的；殘留的；殘渣的；未加說明的；【數學】殘數的，留數的。n 1 殘余；【數學】殘數，...
- capacitance : n. 【電學】電容；電容器。
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The accelerometer which has simple fabricated process and high sensitivity and small parasitic capacitance and residual stress is hybrid integrated with the interface circuit using ic nude chip. so the density of the package is increased, and the noise of the sensing system is decreased. these found the base of capacitive accelerometer module using the mcm method
該傳感器製作工藝簡單，靈敏度高，支撐梁採用u型，減小了刻蝕后的殘余應力，用玻璃作為襯底，減小了襯底和硅可動質量塊間的寄生電容，且把傳感器晶元和用ic裸片製作的介面電路集成在一起，提高了封裝密度，減小了傳感器系統的噪聲，為採用mcm技術製作電容式加速度傳感器模塊打下了基礎。
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