tuned impedance 中文意思是什麼
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In a ccp system, there is a discontiguous characteristic on tuned substrate self - bias. when the impedance between substrate and ground was made increasingly inductive, a large negative dc potential developed on the substrate
在ccp （ capacitivecouplingplasma ）中調諧基片偏壓具有不連續變化現象，當基片之間為漸增的感抗時，基片上會產生漸增的負偏壓。
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