u-shaped glass 中文意思是什麼
u-shaped glass
解釋
形玻璃-
In the dissertation, a micromechanical comb capacitive accelerometer having u - shaped supporting beams is designed, simulated and fabricated on the base of the anodic bonding between the silicon and glass, and bulk silicon micromachining process
而改用體硅微機械製作可以改善這些問題。本文設計、模擬並製作了一種基於硅一玻璃鍵合工藝的u型梁支撐的微機械電容式加速度計。
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