vacuum architecture 中文意思是什麼
vacuum architecture
解釋
分段式真空結構- vacuum : n （pl vacuums vac ua ）1 真空；空處，空虛，空白。2 〈美口〉吸塵器（＝ vacuum cleaner）。vi vt 〈...
- architecture : n. 1. 建築學。2. 建築（樣式、風格）；建築物。3. 構造，結構；【自動化】（電子計算機的）架構，體系結構。
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In the function decision and structure design, the function and the flow of the wafer pre - alignment system are analyzed, the system architecture is selected and the precision of this system is analyzed, the driving mode and the system structure are fixed, and then the motor and raster are selected. at the same time, the structure of parts is designed on consideration of the request and the function of the vacuum grasping of wafer
在總體方案和機構設計方面，分析了晶圓預對準系統的功能與流程，選定了系統的整體方案，確定了系統各單元的驅動方式和機構形式，完成了驅動和檢測部分的選型，同時充分考慮機構中氣動吸附部分的功能與要求，設計了預對準單元的機構。
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