wafer alignment 中文意思是什麼
wafer alignment
解釋
晶圓對準-
In the wafer - cycle fitting algorithm, comparing with circumgyration radius approach, track fitting approach, and least square circle fitting approach. in the wafer pre - alignment system, the wafer square fitting algorithm - least square circle fitting approach, based on optical linear ccd sensor, as well as the theoretical error analyze of this algorithm
在晶圓檢測演算法方面，比較回轉半徑法、軌跡擬合法以及最小二乘圓法，選擇光學線陣ccd的晶圓圓心最小二乘圓法作為系統晶圓圓心的檢測方法。 -
The processes include the deposition of the waveguide film, the design and fabrication of the mask pattern, the lithography, the metal coating with a magnetic sputtering, the lift - off process for the metal mask, the dry deep etching by icp, the slicing of the wafer, the polishing of the cutting edge, the fiber - to - waveguide alignment and at last, the performance testing. some edg chip samples are fabricated
對設計好的集成波導器件，本論文設計並試驗了器件的製作的全部工藝，包括波導薄膜的沉積，掩模的設計製作，光刻，濺射金屬薄膜，剝離法製作金屬掩模，干法深刻蝕，矽片切割，端面磨拋，波導對準和性能測試。 -
Novel alignment technologies for wafer level packaging
圓片級封裝的新穎對準技術 -
The wafer processing system is an important subsystem of the lithography, which consists of a wafer transmission system and a wafer pre - alignment system
晶圓處理系統是光刻機的重要組成子系統，其包含兩個主要部分:晶圓傳輸系統和晶圓預對準系統。 -
In the function decision and structure design, the function and the flow of the wafer pre - alignment system are analyzed, the system architecture is selected and the precision of this system is analyzed, the driving mode and the system structure are fixed, and then the motor and raster are selected. at the same time, the structure of parts is designed on consideration of the request and the function of the vacuum grasping of wafer
在總體方案和機構設計方面，分析了晶圓預對準系統的功能與流程，選定了系統的整體方案，確定了系統各單元的驅動方式和機構形式，完成了驅動和檢測部分的選型，同時充分考慮機構中氣動吸附部分的功能與要求，設計了預對準單元的機構。
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