wafer stage 中文意思是什麼
wafer stage
解釋
晶圓載物臺-
Due to the high costs of wafer materials and machines, it is feasible to apply rework to increase wafer yield at the photolithography stage
摘要在晶圓製造中,由於晶圓的原料及機臺成本昂貴,為了能夠增加晶圓的良率,利用再加工的方式來補救不良的晶圓為可行的措施。 -
Wafer cooling stage
晶圓冷卻夾片臺
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