掃氣通道 的英文怎麼說
中文拼音 [sǎoqìtōngdào]
掃氣通道
英文
scavenge trunk-
Current researches, applications, preparation and structure of si3n4 are summarized in this paper. a new conclusion is drawn that silicon wafer can react with nitrogen at the temperature higher than 1100 and in super - pure nitrogen by direct - nitridation of silicon at the temperature from 800 to 1200. the prepared silicon nitride samples are tested by xps ( x - ray photoelectron spectroscopy ), sem ( scanning electron microscopy ), optical microscopy, xrd ( x - ray diffraction ) and edx ( energy dispersive x - ray analysis )
通過矽片在800到1200各個溫度和各種氮氣氣氛下的氮化處理的實驗結果,報道了不同與其他研究者的氮化條件,矽片在氮氣保護的熱處理中的氮化條件為:高於1100的溫度和高純氮的氣氛條件,同時對該氮化硅薄膜進行了金相顯微鏡、掃描電鏡( sem ) 、 x射線衍射儀( xrd ) 、 x射線光電子譜( xps ) 、 x射線能譜儀( edx )和抗氧化性等測試和分析。
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