深紫外光刻 的英文怎麼說
中文拼音 [shēnzǐwàiguāngkè]
深紫外光刻
英文
deuv lithography- 深 : Ⅰ形容詞1 (從上到下或從外到里的距離大) deep 2 (深奧) difficult; profound 3 (深刻; 深入) thor...
- 紫 : Ⅰ形容詞(紅和藍合成的顏色) purple; violet Ⅱ名詞(姓氏) a surname
- 外 : Ⅰ名詞1 (外面) outside; external side 2 (外國) foreign country 3 (以外) besides; beyond; in ...
- 光 : Ⅰ名詞1 (照耀在物體上、使人能看見物體的一種物質) light; ray 2 (景物) scenery 3 (光彩; 榮譽) ...
- 深紫 : amaranth; modena
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The laser - liga technology provided by this research is the first technology to use ultraviolet laser as the exposal source for su - 8 photoresist lithography. it is a technology with lower cost and big potential to increase the aspect ratio as well as wider application
本文首次提出採用紫外激光作為曝光光源的laser - liga技術,對su - 8膠進行曝光光刻不僅成本低、易推廣,而且具有大幅度提高光刻深寬比的潛力。The methods and systems ( including amplitude division double - beam interference system, three - beam interference system, liquid immersion type deep uv interference system and full automatic interference photolithographic system ) for amplitude division maskless laser interference photolithography are studied and compared
研究和比較了振幅分割無掩模激光干涉光刻方法和系統,包括振幅分割雙光束干涉系統、三光束干涉系統、液浸式深紫外干涉系統及全自動干涉光刻系統。
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