端部退火的 的英文怎麼說
中文拼音 [duānbùtuìhuǒde]
端部退火的
英文
ends annealed- 端 : Ⅰ名詞1 (東西的頭) end; extremity 2 (事情的開頭) beginning 3 (門類; 方面) item; point 4 (原...
- 部 : Ⅰ名詞1 (部分; 部位) part; section; division; region 2 (部門; 機關或組織單位的名稱) unit; mini...
- 退 : 動詞1 (向後移動) retreat; draw back; move back 2 (使向後移動) cause to move back; remove; wit...
- 火 : fire
- 的 : 4次方是 The fourth power of 2 is direction
- 端部 : telos
- 退火 : [冶金學] anneal; annealing; back-out
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In this paper, the flow pattern defects ( fpds ) were revealed by secco etchant and their shape, distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ). the relationship between etching time and the tip structure of fpds was also discussed. furthermore, by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar, the annihilation mechanism of fpds was discussed in this paper
本文將cz硅單晶片在secco腐蝕液中擇優腐蝕后,用光學顯微鏡和原子力顯微鏡對流動圖形缺陷( flowpatterndefects , fpds )在矽片中的形態、分佈及其端部的微觀結構進行了仔細地觀察和研究,並討論了腐蝕時間對fpds缺陷端部結構的影響;本文還通過研究ar氣氛下快速退火( rapidthermalannealing , rta )對fpds缺陷密度的影響,初步探討了fpds的消除機理。
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