蝕刻系統 的英文怎麼說
中文拼音 [shíkèxìtǒng]
蝕刻系統
英文
etching system-
Magnetization magneto - microwave plasma etching system
磁場微波型等離子體蝕刻系統Magnetron enhanced reactive ion etaching system
磁控管增強型反應性離子蝕刻系統Hardware and software design for the inductively coupled plasma etching machine " s system are also presented
介紹了plc控制等離子體刻蝕機的硬體系統和軟體系統的設計。At present, feas have potential for use as an electron source in a wide variety of applications, including microwave power amplifiers ( such as twts, klystron ), flat panel displays, electron microscopy, and electron beam lithography
目前，場致發射陣列陰極的應用領域十分廣泛，主要包括微波器件（應用於twts ， klystron等） 、平板顯示器（ feds ） 、電子顯微鏡及電子束刻蝕系統等。其中，應用研究的焦點主要集中在平板顯示器和射頻功率放大器。In the present works, a self - consistent model describing the dynamics of radio - frequency ( rf ) sheath was established. the effects of collisions on the rf sheath dynamics, distributions of ion energy and angle incident on the substrate and the etching profiles were investigated numerically
本文建立了一套自洽的碰撞射頻等離子體鞘層理論模型，系統地研究了碰撞效應對等離子體鞘層的物理特性、離子入射到基板上的能量分佈和角度分佈以及刻蝕剖面的影響。The principle, theory, realizing methods for holographic lithography as well as the pattern transfer mechanism among the traditional photomask - hologram mask - resist have been deeply investigated. an experimental system with total inner reflection wavefront conjugation holographic lithography using right angle prism and refractive index matching liquid is designed and built, and the experimental research is carried out
對全息光刻的原理、理論、實現方法及傳統光掩模?全息掩模?抗蝕劑圖形傳遞機理進行了深入的研究，設計和建立了採用直角棱鏡和折射率匹配液的全內反射波前共軛全息光刻實驗系統，進行了實驗研究。Reactive ion beam etching system ribe system
反應性離子束蝕刻系統Overflow cup etching system
溢流杯蝕刻系統Narrow gap reactive ion etching system
狹窄間隙反應性離子蝕刻系統Parallel plate reactive ionetching system
平行板反應性離子蝕刻系統Reactive ion etching system rie system
反應性離子蝕刻系統The aim of defocus detection is to achieve high etching quality by providing the defocus error signal for focus - servo system which can make the etching spot focus accurately
離焦檢測的任務是為聚焦伺服系統提供聚焦誤差信號，使寫入光斑能夠精確聚焦，從而保證刻蝕質量。The accelerometer which has simple fabricated process and high sensitivity and small parasitic capacitance and residual stress is hybrid integrated with the interface circuit using ic nude chip. so the density of the package is increased, and the noise of the sensing system is decreased. these found the base of capacitive accelerometer module using the mcm method
該傳感器製作工藝簡單，靈敏度高，支撐梁採用u型，減小了刻蝕后的殘余應力，用玻璃作為襯底，減小了襯底和硅可動質量塊間的寄生電容，且把傳感器晶元和用ic裸片製作的介面電路集成在一起，提高了封裝密度，減小了傳感器系統的噪聲，為採用mcm技術製作電容式加速度傳感器模塊打下了基礎。Inductively coupled plasma etching system
感應耦合型等離子體蝕刻系統Barrel type plasma etching system
圓筒型等離子體蝕刻系統Reactive sputter etching system
反應性濺鍍蝕刻系統Photo excited etching system
光激勵蝕刻系統Immersion wet etching system
浸漬式蝕刻系統Wet etching system
濕式蝕刻系統Ion beam etching system
離子束蝕刻系統分享友人