蝕刻模式 的英文怎麼說
中文拼音 [shíkèmóshì]
蝕刻模式
英文
etching pattern-
Then, the kirchhoff scalar diffraction theory is used to derive the scatter field of the edo grating and the simulation model is presented
並利用基爾霍夫標量衍射理論導出了edg光柵散射場的公式,建立了對蝕刻衍射光柵的模擬模型。The reactor is capable of working in the rie ( reactive ion etching ) mode and also in the plasma etching mode
反應腔擁有在rie (反應離子刻蝕)模式和等離子刻蝕模式下工作的能力。In the plasma - etching mode the passivation layer that is formed on the surface is likely to be thicker than in the case of rie
在等離子刻蝕模式下,表面形成了比使用rie情況下更厚的鈍化層。The accelerometer which has simple fabricated process and high sensitivity and small parasitic capacitance and residual stress is hybrid integrated with the interface circuit using ic nude chip. so the density of the package is increased, and the noise of the sensing system is decreased. these found the base of capacitive accelerometer module using the mcm method
該傳感器製作工藝簡單,靈敏度高,支撐梁採用u型,減小了刻蝕后的殘余應力,用玻璃作為襯底,減小了襯底和硅可動質量塊間的寄生電容,且把傳感器晶元和用ic裸片製作的介面電路集成在一起,提高了封裝密度,減小了傳感器系統的噪聲,為採用mcm技術製作電容式加速度傳感器模塊打下了基礎。Rf plasma system 9200 is a barrel - type batch stripping system with optional high temperature capabilities for photoresist removal, nitride etch, and other cleaning applications in semiconductor and mems fabs
射頻等離子體9200是桶式爐脫模體,擁有可控制的高溫系統可去除光阻材料、氮化物蝕刻和半導體與微型機電系統等方面的清洗功能分享友人