in-plane moire method 中文意思是什麼
in-plane moire method
解釋
面內雲紋法-
In - plane moire method
面內雲紋法 -
In order to study the thermal performance and residual stress of microelectronic subassembly, in this paper, a newly optical interferometry method for 3 - d displacement measurement is developed based on wavefront interference theory. in which the moire interferometry provide the in - plane displacement, but the system is different from the conventional interferometry, the system applies the double diffraction of the specimen grating, the in - plane displacement sensitivity is a factor of 2 higher than that of the conventional moire interferometer. twyman / green interferometry method for out - of - plane displacement measurement is adapted, the advantages of the optical set - up are structure novelty, and the fringe patterns of the displacement fields shown high contrast and spatial resolution
為了詳細研究試件的熱變形特徵以及殘余應力的影響作用,本文在波前干涉理論的基礎上,設計了一新型三維光學測試系統,該系統的平面位移測試基於雲紋干涉方法,但採用與普通雲紋干涉不同的光路系統,利用試件光柵和平面反射鏡組形成的兩次衍射,使平面位移干涉條紋倍增,測量靈敏度是普通雲紋干涉的2倍,系統的離面位移場測試採用泰曼格林干涉光路。
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