langmuir frequency 中文意思是什麼
langmuir frequency
解釋
朗謬爾頻率-
This paper mainly study on the technics of preparing nano - si3n4 and icpecvd. seeking for the proper parameter and technics, crystallization of nano - si3n4 powder with muffle furnace, probe the new effective way of improving the properties of nano - si3n4 powder the ion density in the reaction chamber was diagnosed by a langmuir probe. the rules were obtained under different air pressure, different radio frequency power and different position which the ion density changes about from 1010cm - 3 to 1010cm - 3 decreasing as the pressure increases and increasing as the power decreases
利用朗繆爾探針診斷了反應室內等離子體參數，得到不同位置、不同功率和不同氣壓下等離子體密度的變化規律，結果表明離子密度為10 ~ 8 10 ~ （ 10 ） cm ~ （ - 3 ） ，等離子體密度隨著功率的增大而增大，隨著氣壓的升高而減小，由於離子鞘層的存在，在一定條件下提供了局部等離子體密度穩定的區域。
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