lithographic paper 中文意思是什麼
lithographic paper
解釋
石印紙- lithographic : adj. 1. 平版畫的；石印的，平版印刷品的。2. 平版印刷（術）的。adv. -ically
- paper : n 1 紙；裱墻紙。2 報紙，報。3 收據；債券；證券；票據；匯票；鈔票（＝paper money）。4 〈pl 〉身份...
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The basics of lithography process, as well as the basic structure of lithographic system and the basic theory of partially coherent imaging are introduced in this paper. a bi - linear model of optical imaging is also presented. based on these theories, the simulation process of csplat is particularly analyzed, especially the computation of tccs ( transmission cross coefficient ) under different illuminations and the processing of primary lens aberrations inside tcc computation process
本文從光刻基本過程入手，介紹了光刻機光學系統的基本組成、部分相干光透射成像的基本原理，提出了光學系統的雙線性模型，並在此基礎上詳細分析了模擬軟體splat的模擬過程，其中著重分析了光學系統的傳輸交叉系數tcc的計算，包括不同照明系統下tcc的計算以及tcc計算中像差的處理。
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