photolithography mask layers 中文意思是什麼
photolithography mask layers
解釋
光石版照相罩幕層- photolithography : n. 照相平版印刷術。
- mask : n 1 假面具，偽裝，掩蔽物；面罩；防毒面具（＝ gas mask）；【物理學】掩模；（劈劍，棒球等用）護面；...
- layers : 板層
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When the two layers of sio2 with different refractive index are finished, the designed mask pattern is printed on the film by photolithography. after that, icp is performed for dry etching, then, the waveguide structures are obtained. at present, the rudimental graph of edg has been obtained
兩層不同折射率的sio _ 2薄膜制備好之後，經過光刻、等離子體刻蝕（ icp ）的工藝步驟之後，形成了波導結構，初步製作出了器件的圖形。
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