濺射反應器 的英文怎麼說
中文拼音 [jiànshèfǎnyīngqì]
濺射反應器
英文
sputter reactor- 濺 : 動詞(液體受沖擊向四外射出) splash; spatter
- 射 : Ⅰ動詞1 (用推力或彈力送出) shoot; fire 2 (液體受到壓力迅速擠出) discharge in a jet 3 (放出) ...
- 反 : Ⅰ名詞1 (方向相背) reverse side 2 (造反) rebellion 3 (指反革命、反動派) counterrevolutionari...
- 應 : 應動詞1 (回答) answer; respond to; echo 2 (滿足要求) comply with; grant 3 (順應; 適應) suit...
- 器 : 名詞1. (器具) implement; utensil; ware 2. (器官) organ 3. (度量; 才能) capacity; talent 4. (姓氏) a surname
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Firstly, the tio2 thin films are deposited by dc reactive magnetron sputtering apparatus, and characterlized by n & k analyzer1200, x - ray diffraction spectroscopy ( xrd ), scanning electronic microscopy ( sem ), alpha - step500. and it was analyzed that the effect on performance and structure of films with the change of argon flow, total gas pressure, the substrate - to - target distance and temperature
第一、應用穩定的直流磁控濺射設備制備tio2減反射薄膜並通過n & kanalyzer1200薄膜光學分析儀、 x射線衍射分析( xrd ) 、掃描電子顯微鏡( sem ) 、 alpha - step500型臺階儀等儀器對薄膜進行表徵,分析氧分壓、總氣壓、工作溫度、靶基距等制備工藝參數對薄膜性能結構的影響。Three kinds of different methods, namely anode oxidation, micro - arc oxidation and dc reactive magnetron sputtering, were employed to treat aluminum substrate which is used for power electronic devices in order to get an insulating surface by form a layer of aluminum nitride ( aln ) or aluminum oxide ( al2o3 ) film
本文分別採用陽極氧化法、微弧氧化法和磁控反應濺射沉積氮化鋁薄膜的方法對功率電子器件用金屬鋁基板表面進行絕緣化處理。A special clamp for etching optical fiber and depositing pd film on the fiber is designed. designed a encapsulation set of the characteristics that is dampproof, shake and eroding resisted. the experimental set - up for hydrogen sensing includes the light source, gas cell, mass flow controller, stainless steel helical tubing and the detector, etc. the experimental results are also discussed
本文還設計了一套光纖腐蝕用夾具、光纖封裝加熱夾具和一套光纖濺射鍍膜實驗夾具;設計並製作了一套具有防潮、抗震和抗腐蝕功效的光纖傳感頭封裝裝置;設計了一套由激光器、反應混合氣室、光功率計、質子流量計和流量控制器等組成的氫氣定標實驗裝置並對實驗數據進行了分析與處理。The work mainly consists of four parts : the first part is to use oxidation and lpcvd technique to produce sio2 mask film and si3n4 insulation film in order to enhance the heating efficiency of micro chamber, and guarantee the carry out of the reaction. the second part is to use the combination of dry etching and wet etching to produce reaction micro chamber, it is the container which carry out the pcr reaction, and dna sample carry out amplification reaction here. the third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the pcr reaction
首先,利用氧化工藝和lpcvd技術,生長sio _ 2掩膜層和si _ 3n _ 4絕緣層,以提高反應腔的熱效率,保證擴增反應的順利進行;其次,用濕法腐蝕和干法刻蝕相結合的方法加工微型腔體,使之作為dna樣品進行pcr擴增反應的容器;第三,用濺射、光刻等工藝在微型腔體底部製作微型加熱器和溫度傳感器,實現對反應腔體的加熱及其溫度的精確測量,提供pcr擴增反應所需的溫度條件。分享友人