bulk micromachining 中文意思是什麼

bulk micromachining 解釋
體細微加工
  • bulk : n 1 體積，容積，大小。2 巨大；龐然大物；大塊；大批，大量。3 貨艙；船貨；散裝貨物。4 〈the bulk〉...
  • micromachining : 微製造
  1. In the dissertation, the effects of the air slide - film damping on the capacitive accelerometers having different slot structures which are completely or partly etched, and fabricated by the anodic bonding between silicon and glass and bulk silicon micromachining process are researched by changing the distance between the moving structure and substrate, the thickness of the structure, the width of the completely etched slot structure, the depth of the partly etched slot structure according to the two well known air slide - film damping models

    對于橫向運動的體微機械器件，其周圍空氣表現為滑膜阻尼。本文基於滑膜阻尼的兩個模型，通過改變振子與襯底的間距、振子的厚度、刻透的柵槽的寬度、沒有刻透的柵槽的深度等參數，研究了這些參數對硅?玻璃鍵合工藝製作的體硅微機械電容式傳感器阻尼特性的影響。
  2. Fabrication process of the microgripper based on silicon bulk micromachining is designed. effects of footing and lag in icp and bonding failure are discussed as emphases. the cantilever type gripping finger that is 6 m wide and 5471 m in equivalent length was released successfully characteristic of comb - drive electrostatically actuated microgripper is tested

    進行了大量的工藝試驗和分析，特別對大深寬比的超長長度懸臂梁型夾持臂及梳狀驅動結構進行了深入研究，解決了微細加工工藝中的關鍵技術。
  3. Focusing on a tuning fork vibratory gyroscope fabricated through silicon bulk micromachining, the matrix perturbation technology in the random finite element method was introduced to analyze the statistical characteristics of the natural frequencies and output capacitance of tuning fork vibratory gyroscope

    摘要以一種通過體微機械加工技術制備的音叉振動式微機械陀螺為對象，基於隨機攝動技術定量計算了微陀螺固有頻率變異和檢測輸出電容變異的統計特徵，以概率思想表達了微陀螺批量加工過程所帶來的材料尺寸隨機誤差對其性能的影響。
  4. This dissertation introduces the technique of bulk micromachining, and explains the fabrication process of this optical - switch on emphases

    本論文在闡述了常用的微機械加工工藝的基礎上，重點介紹了這種微機械光開關的製作過程。
  5. The capacitive accelerometers fabricated by bulk micromachining process have large sensitive mass, small noise and high resolution compared to the ones fabricated by surface micromachining process

    用表面微機械製作的電容式傳感器，其敏感質量較小、熱機械噪聲大、解析度不摘要高。
  6. . 5. the samples with characteristic impedances of 120 and 50 have been fabricated through the surface micromachining and bulk micromachining. stress relaxation has been considered carefully through designing and fabricating, to obtain the structures with the lowest stress

    利用混合腐蝕工藝制備了v型槽mems共平面波導，其中特性阻抗為50的傳輸線採用體硅加工技術實現，而120傳輸線則採用表面微機械加工技術實現。
  7. This paper is one part of the uestc ’ s assignment ? ? “ the design and research of mimu ” 。 by the research for mems and the mems acceleration sensor, this assignment will finish a series of mimu system, which will be applied to the rocket and the missile guided system. this thesis mainly include following facets : research the mature mems processing technic at the present, develop a type of capacitive acceleration sensor which structure is simple and based on a set of new silicon bulk micromachining process

    本論文來自電子科技大學機械電子工程學院的課題「 mems慣性組合的設計與研究」 。該課題希望通過對mems技術和mems慣性傳感器的研究，研製和設計出一系列能夠應用於火箭和導彈制導的mimu系統。主要進行了一下工作:研究了目前較為成熟的mems加工工藝，提出了一種結構簡單，基於各向異性體硅微加工技術的電容式加速度傳感器。
  8. The micromechanical comb - capacitive accelerometers fabricated by bulk silicon micromachining process are widely used for having simple process, small temperature coefficient, good stability and easily controllable damping coefficient

    用體硅微機械工藝製作的梳齒電容式傳感器有製作工藝簡單、溫度系數小、穩定性好、阻尼系數容易控制等優點，因而應用廣泛。
  9. In the dissertation, a micromechanical comb capacitive accelerometer having u - shaped supporting beams is designed, simulated and fabricated on the base of the anodic bonding between the silicon and glass, and bulk silicon micromachining process

    而改用體硅微機械製作可以改善這些問題。本文設計、模擬並製作了一種基於硅一玻璃鍵合工藝的u型梁支撐的微機械電容式加速度計。
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