microbridge 中文意思是什麼
microbridge
解釋
微橋-
The chip of microbridge structure thermocouple type microwave power sensor is designed by using seeback domino offect of thermocouple. ta2n of relatively low resistor - temperature coefficient and si of relatively high thermoelectric power seebeck coefficient are used as thermocouple materials in the chip
微梁結構熱偶微波功率傳感器晶元就是利用熱偶的塞貝克效應設計的，晶元選擇具有低電阻溫度系數的ta2n和具有高熱電系數的半導體單晶si作為熱偶材料。 -
In the course of designing a microbolometer, it is the most difficult to design microbridge structure
摘要微測輻射熱計的設計難點是起支撐作用的微橋結構的設計。 -
Both the effect of substrate deformation and the state of large deflection of the microbridge are involved in the theoretical expression. furthermore, the distribution of axial stress in the micro bridge is discussed in detail by taking different shapes of cross section into consideration. and a shape factor is introduced into the expression, which simplifies the theoretical expression
理論上對薄膜微橋法的公式進行了進一步的化簡，在考慮襯底變形貢獻和大撓度的基礎上，進一步探討了微機械加工過程中不同橫截面形狀的情形；並對矩形和梯形截面微橋的軸向應力分佈作了分析，補充和發展了薄膜微橋法的理論；引入了橫截面形狀修正因子，簡化了公式的表達和計算。 -
Etching microbridge for upfa devices
器件微橋腐蝕工藝的研究 -
On the basic of analyzing and comparing several popular microbridge structures, the high quality of multi - level structure has been point out
重點研究了現在流行的幾種微橋結構，對其性能參數進行分析比較，提出了多層結構的優點。 -
Microwave power sensor is the core component of microwave power meter ， and it has been researched by many domestic and overseas research institutions, but micro - structure microwave power sensor developed by using mems technology is few yet. in this paper, design and fabrication of a new chip of microbridge structure thermocouple type microwave power sensor developed by using mems technology were recommended
微波功率傳感器是微波功率計探頭中的核心元件，在該領域國內外已有大量的研究，但利用mems技術研製的微結構微波功率傳感器至今還很少，本文主要介紹了一種用mems技術研製的微梁結構熱偶微波功率傳感器晶元的設計和製作工藝。
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