sputtered layer 中文意思是什麼
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In order to increase the thickness and improve the quality of sputtered films, low deposition rate and 30nm ta buffer layer on substrate have been adopted. as a result, 3 u m single films and 2. 6 u m / 2. 6 u m 72. 6 u m sandwiched films have been successfully prepared
通過降低濺射速率和在基底上沉積30nm的tabuffer （緩沖層） ，解決了難以濺射生長厚膜的問題，成功制備了厚度3 m的單層膜和每層厚度2 . 6 m的三明治膜。
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