trench etching 中文意思是什麼
trench etching
解釋
槽腐蝕-
Temperature influence on etching rate of si deep trench using icp with sf6 o
刻蝕硅深槽基片溫度對刻蝕速率的影響 -
Finally, according to the technique of plasma etching, an evolution model describing the spatio - temporal profiles of the micro - trench is established. and that we simulated the effects of collisions and the source parameters on the etching profiles
最後,針對等離子體刻蝕工藝,建立了微結構區剖面的時空演化模型,並模擬了碰撞效應和電源參數對刻蝕剖面演化的影響。
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