楊氏膜量 的英文怎麼說
中文拼音 [yángshìmóliáng]
楊氏膜量
英文
young's modulus-
The tested materials include ( 100 ) silicon wafer, ( 110 ) silicon wafer, poly - silicon thin film, dry oxidized silicon dioxide thin film, wet oxidized silicon dioxide thin film, lto thin film, standard lpcvd silicon nitride film, low stress lpcvd silicon nitride film, alumni nitride film, zinc oxide film etc. in the nanoindentation experiment of the single crystal silicon, two different mechanical phases are observed at different indentation depth
用納米壓入法對( 100 )單晶硅及( 110 )單晶硅、多晶硅薄膜、干氧薄膜、濕氧薄膜、 lto薄膜、標準氮化硅薄膜、低應力氮化硅薄膜、氮化鋁薄膜、氧化鋅薄膜等重要材料的楊氏模量和納米硬度進行了系統地測量。報道了單晶硅在壓入過程中觀測到的兩個力學相的變化。In the other method, young ' s modulus, residual stress, and bending strength are characterized under a wedge tip by means of micro bridge deflection tests
利用楔形壓頭和薄膜微橋撓曲法,得到了標準氮化硅、低應力氮化硅和氮化鋁薄膜的楊氏模量、殘余應力和彎曲強度。
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