optical proximity correction 中文意思是什麼
optical proximity correction
解釋
光學距離校正- optical : adj 眼的；視覺的；視力的；幫助視力的；光學（上）的。 optical activity 【物理學】旋光性。 an optic...
- proximity : n 接近，鄰近；臨近；接近度，距離；親近 （to）。 proximity of blood 近親。 in close proximity （to...
- correction : n 修正，改正；校正；矯正；〈古語〉懲罰；勘誤表，補正。 a copy disfigured by numerous corrections ...
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Before more advanced lithography tool is produced, in order to use current tools to manufacture vdsm ic, reticle correction methods such as perturbing the shape ( via optical proximity correction ( opc ) ) or the phase ( via phase - shifting masks ( psm ) ) of transmitting aperture in the reticle are proposed by the industry
在波長更小的光刻系統出現前，為了能利用現有設備解決集成電路的可製造性問題，工業界提出了對掩模作預失真（光學鄰近校正）和在掩模上加相位轉移模（移相掩模）等的掩模校正方法。 -
An efficient approach to rules - based optical proximity correction
一種新的光學臨近校正方法 -
Optical proximity correction ( opc ) is emerging as an important tool in design and manufacturing of next generation integrated circuits
光學鄰近效應校正（ opc ）是下一代集成電路設計和生產的重要工具。 -
For the coordination of the contradictory, the wavefront technique has been regarded as an effective method to improve the image quality in photolithography by optimizing the image of the mask. it includes : pupil filtering, phase shift mask, off - axis illumination, optical proximity correction, and so on
為了協調這種矛盾，利用波前工程來改善光刻圖形的質量以提高光刻解析度，已廣泛地應用於光學光刻中，如：瞳孔濾波、相移掩模、離軸照明、光學鄰近效應校正等。 -
Opc optical proximity correction
光學臨近修正
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