濺射現象 的英文怎麼說
中文拼音 [jiànshèxiànxiàng]
濺射現象
英文
phenomenon sputtering-
The theory of ion - beam etching and ion sources are reviewed. the classification of ion - beam etching are introduced. according to the mechanism that ion sputtering leads to faceting, trenching, reflection and redeposition, some relative solutions are put forward
綜合敘述了離子束刻蝕技術和離子源的工作原理，簡單介紹了離子束刻蝕的分類，闡述了離子束刻蝕的物理濺射效應導致的刻面，開槽，再沉積等現象的產生機理及解決辦法，分析了kaufman離子源進行ribe的可行性及出現的問題。Bias voltages exert a small effect to the residual stress of al coatings, but do a considerable effect to the coatings composition such as the preferential sputtering in al - zn coatings at - 100v
偏壓對鋁鍍層殘余應力的影響較小，且總體變化不大，但在- 100v偏壓下， al - zn鍍層的成分有明顯的擇優濺射現象。
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