濺射介質薄膜 的英文怎麼說
中文拼音 [jiànshèjièzhíbómó]
濺射介質薄膜
英文
sputtered dielectric film- 濺 : 動詞(液體受沖擊向四外射出) splash; spatter
- 射 : Ⅰ動詞1 (用推力或彈力送出) shoot; fire 2 (液體受到壓力迅速擠出) discharge in a jet 3 (放出) ...
- 質 : Ⅰ名詞1 (性質; 本質) nature; character; essence 2 (質量) quality 3 (物質) matter; substance;...
- 薄 : 名詞[方言] (浮萍) duckweed
- 膜 : 名詞1. [生物學] (像薄皮的組織) membrane 2. (像膜的薄皮) film; thin coating
- 薄膜 : thin film; film; diaphragm
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Compound medium wave - guide film on columned li - ferrites was made by magnetron sputtering system
用磁控濺射的方法在圓柱鋰鐵氧體表面鍍覆了復合介質波導薄膜。Compared to other commonly referenced high - k materials, hfo2 is known for its stability on silicon and process compatibility. the fabrication and electrical properties of hfo2 and hfoxny gate are carefully studied. with the study on hfo2. we can receive a few significative conclusion : 1
結果表明,與傳統的hf清洗的si表面相比, nh _ 4f清洗的si表面與hfo _ 2具有更好的熱力學穩定性,因而可獲得更低的eot和柵泄漏電流密度; 3 )研究了濺射氣氛和退火工藝對hfo _ 2柵介質薄膜性質的影響。The thesis main parts are as followings : ( 1 ) the mechanical properties of the cnx thin film on the various substrate materials by dc magnetron reactive sputtering. ( 2 ) the study of the cnx film structure by x - ray diffraction
文章主要部分介紹、論述、總結了我在做畢業論文期間進行的五方面工作: ( 1 )用直流磁控反應濺射方法在各種材料襯底上沉積cnx超硬薄膜,研究在不同襯底對薄膜的力學性質的影響。
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