蝕刻腔 的英文怎麼說
中文拼音 [shíkèqiāng]
蝕刻腔
英文
etched cavity-
The reactor is capable of working in the rie ( reactive ion etching ) mode and also in the plasma etching mode
反應腔擁有在rie （反應離子刻蝕）模式和等離子刻蝕模式下工作的能力。Abstract : based on ash chamber of metal etch, this paper describes the full process of dry clean development and evaluation
摘要：本文以金屬刻蝕去膠腔為背景，簡述干刻清洗工藝開發和評價過程。The work mainly consists of four parts : the first part is to use oxidation and lpcvd technique to produce sio2 mask film and si3n4 insulation film in order to enhance the heating efficiency of micro chamber, and guarantee the carry out of the reaction. the second part is to use the combination of dry etching and wet etching to produce reaction micro chamber, it is the container which carry out the pcr reaction, and dna sample carry out amplification reaction here. the third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the pcr reaction
首先，利用氧化工藝和lpcvd技術，生長sio _ 2掩膜層和si _ 3n _ 4絕緣層，以提高反應腔的熱效率，保證擴增反應的順利進行；其次，用濕法腐蝕和干法刻蝕相結合的方法加工微型腔體，使之作為dna樣品進行pcr擴增反應的容器；第三，用濺射、光刻等工藝在微型腔體底部製作微型加熱器和溫度傳感器，實現對反應腔體的加熱及其溫度的精確測量，提供pcr擴增反應所需的溫度條件。
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