substrate impurity 中文意思是什麼
substrate impurity
解釋
襯底雜質-
The solution to the problem of hydrogen contained in the film was initially proposed for pecvd technique. meanwhile, the adoption of substrate bias assisted deposition further eliminated the impurity o in the film
首次解決了採用pecvd法低溫制備? sic薄膜中的含氫問題;同時,採用偏壓輔助的技術,進一步解決了薄膜中的含氧問題。
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